| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum film deposition system where useless evaporation particles can be shielded and catched by an easily attachable/detachable, relatively compact shielding body. SOLUTION: Regarding the vacuum deposition system 1 where a workpiece W and an evaporation material source 4 are arranged so as to be confronted un and down in a vacuum chamber 2, the system is provided with a cylindrical shielding body 5 surrounding the evaporation material source 4, and further regulating the diffusion range of an evaporation flow A from the evaporation material source 4 in the opening part of the upper end so as to correspond to the size of the workpiece W. COPYRIGHT: (C)2008,JPO&INPIT
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