| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an infrared gas analyzer and an output compensation method therefor, which perform highly-accurate measurement operation by removing an influence of external vibration applied to the infrared gas analyzer. <P>SOLUTION: The analyzer has a detector for measurement is equipped with: a thermal flow sensor, for detecting a difference between infrared light transmitted through a sample cell through which sample gas flows and infrared light not transmitted through the sample cell; a detector for compensation for detecting an influence of vibration; and a compensation part for compensating the influence of vibration. The compensation part has: a first operation part for determining a signal component caused by the vibration applied to the detector for compensation from an output from the detector for compensation; a second operation part which has a function showing a relation between an output signal detected by the detector for measurement and an output signal detected by the detector for compensation when the same vibration is applied thereto, and determines a signal component caused by the vibration included in the output signal detected by the detector for measurement from the signal component determined by the first operation part; and a third operation part for subtracting the output from the second operation part from the output from the detector for measurement. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
