摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor which can reduce characteristics fluctuations caused by being mounted on a wall of an object under measurement. SOLUTION: A chamber 32 in a housing 30 is formed with a notch part 39. Owing to the notch 39, even when the housing 30 deforms by an axial force, the effect of the deformation is not transmitted to a welded part 37. This can reduce a force acting on a ring weld 36 or a metal diaphragm 35 in the negative pressure direction (the direction toward a pressure introduction hole 31) and reduce the effect on a pressure detection chamber 40 in which oil 41 is enclosed. The pressure in the pressure detection chamber 40 can be thereby prevented from deviating from a desired standard pressure to reduce the characteristics fluctuations of the pressure sensor S1. The pressure sensor S1 is thereby provided with the capability of performing accurate pressure detection. COPYRIGHT: (C)2008,JPO&INPIT
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