| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen sensor capable of suppressing a harmful influence caused by a non-hydrogen component or deterioration caused by hydrogen, and detecting hydrogen gas with high sensitivity. SOLUTION: This hydrogen sensor 2 comprises a ceramics substrate 4, a lower layer ceramics protection film 6 and an upper layer ceramics protection film 8 formed successively on the ceramics substrate 4, a hydrogen detection film 10 buried between the upper layer ceramics protection film 8 and the lower layer ceramics protection film 6, and a pair of electrodes 20a, 20b formed near both fringes of the hydrogen detection film 8 on the surface of the upper layer ceramics protection film 8. In the hydrogen sensor, at least the upper layer ceramics protection film 8 is formed from a composite material protection film formed by dispersing hydrogen-permeable metal particles 12, 14 in ceramic materials 16, 18. COPYRIGHT: (C)2008,JPO&INPIT
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