| 摘要 |
PROBLEM TO BE SOLVED: To prevent a probe card from curving owing to a temperature change. SOLUTION: This probe card 10 is equipped with a probe unit 12 with probe pins 13 held on its front, and a PCB board 11 with the probe unit 12 held on its front. This probe card 10 is equipped with an annular disc spring 14 comprising inner and outer edge parts severally fixed to a first fixing member 15 in a middle part of a back face of the PCB board 11 and to a second fixing member 16 in a peripheral part thereof. The fixing member 15 projects from the back face of the PCB board 11 higher than the fixing member 16. Further, a fixing part 23 of the fixing member 15 and that of the fixing member 16 each comprise a pair of plate-shaped members, with the disc spring 14 sandwiched between the pair of plate-shaped members. COPYRIGHT: (C)2008,JPO&INPIT
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