发明名称 SUBSTRATE-LIKE PARTICLE SENSOR
摘要 A substrate -like particle sensor (100) includes a substrate- like base portion (102) and an electronics enclosure (104) disposed on the substrate-like base portion (102). A power source (204) is located within the electronics enclosure (104). A controller (208) is operably coupled to the power source (104). A particle sensor (214) is operably coupled to the controller (208) and provides an indication to the controller (208) of at least one particle present near the particle sensor (214).
申请公布号 WO2008042199(A2) 申请公布日期 2008.04.10
申请号 WO2007US20814 申请日期 2007.09.27
申请人 CYBEROPTICS SEMICONDUCTOR, INC.;BONCIOLINI, DENNIS, J.;RAMSEY, CRAIG, C.;GARDNER, DELRAE, H.;SCHUDA, FELIX, J. 发明人 BONCIOLINI, DENNIS, J.;RAMSEY, CRAIG, C.;GARDNER, DELRAE, H.;SCHUDA, FELIX, J.
分类号 主分类号
代理机构 代理人
主权项
地址