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发明名称
Vakuumbeschichtungsanlage zum Beschichten von längserstreckten Substraten
摘要
申请公布号
DE10352144(B4)
申请公布日期
2008.04.10
申请号
DE20031052144
申请日期
2003.11.04
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
GAWER, OLAF;MELCHER, JENS;LESMANN, STEFFEN;ZSCHIESCHANG, ERWIN
分类号
C23C14/35;C23C14/56;H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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