| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing process and an inspection method of an electronic device having a strip connection conductor. <P>SOLUTION: The manufacturing process of a semiconductor device 10 having a strip connection conductor 16 for connecting an electrode pad 14 (first connection part) and a lead terminal 15 (second connection part) comprises a step for determining the frequency characteristics of the oscillation speed of the connection conductor 16 by oscillating the semiconductor device 10 while sweeping the oscillation frequency f, a step for comparing the frequency characteristics of the oscillation speed of the connection conductor 16 with first reference frequency characteristics and determining first comparison result, a step for determining the frequency characteristics of the oscillation speed of a test component 41 by oscillating a known test component 41 while sweeping the oscillation frequency, a step for comparing the frequency characteristics of the oscillation speed of the test component 41 with second reference frequency characteristics and determining second comparison result, and a step for detecting a connection failure portion of the connection conductor 16 based on the first and second comparison results. <P>COPYRIGHT: (C)2008,JPO&INPIT |
