| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve a problem in defect classification that it is difficult to manually set all as to rule-based defect classification. <P>SOLUTION: In this defect classification method, defects are classified by using a classifier with a binary-tree structure based on the characteristic quantities of defects extracted based on a detection signal obtained from this defect inspection device. This classifying method comprises a classifier construction process for constructing the classifier with the binary-tree structure by setting branching conditions made up of defect classes belonging to groups on both sides of a branch, a characteristic quantity used for branching, and discrimination standards, for each of branch points of the binary-tree structure, based on the instruction of characteristic quantity data previously related to the defect classes. This method is characterized in that the construction process further includes: a priority order designation process for previously prioritizing and designating target classification performance on every defect class, as a whole, and on the worst purity and accuracy; and an evaluation process for displaying an evaluation result on every item by evaluating based on an item-by-item whether the designated classification performance based on the set branching conditions is satisfied or not. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
