| 摘要 |
PROBLEM TO BE SOLVED: To shorten an inspection time, to always allow the optical axis of a microscope to coincide with that of a transmission illumination part by positionally correcting the same at an arbitrary position and to hold the uniformity of luminous intensity at the time of microscopic observation. SOLUTION: When the microscope 4 is moved in an X-direction by a gate shaped arm 3 while moving a substrate A in a Y-direction by a substrate stage 2 and the transmission illumination part 6 is moved in the X-direction by a transmission illumination part moving mechanism 5 in synchronous relation to the movement of the microscope, a fine adjusting stage 7 is driven on the basis of the correction data preliminarily stored in a memory part 14 by a control part 13 to move the transmission illumination part in the X-, Y- and Z-directions. By this constitution, the optical axis of the microscope is allowed to coincide with that of the transmission illumination part and the focuses of them are allowed to coincide with each other. COPYRIGHT: (C)2008,JPO&INPIT
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