| 摘要 |
PROBLEM TO BE SOLVED: To enhance a variable capacitance ratio by varying the capacitance with the use of an electrostatic force. SOLUTION: A movable plate 12 is supported by a plate spring part 14 so that the movable plate 12 can move up and down against a substrate 11. A fixed plate 13 fixed to the substrate 11 is arranged over the movable plate 12. A fixed-side drive electrode 32 on the substrate 11 is arranged relatively under, and the movable-side drive electrode 33 provided to the plate spring part 14 is arranged relatively over. The fixed-side capacitive electrode 34 provided to the fixed plate 13 is arranged relatively over, and the movable-side capacitive electrode 31 provided to the movable plate 12 is arranged relatively under. This arranges the electrodes 31 to 34 so that the electrostatic force generated between the drive electrodes 32, 33 is generated in a direction to widen the interval between the movable electrodes 31, 34. COPYRIGHT: (C)2008,JPO&INPIT
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