| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus capable of efficiently cleaning objects to be cleaned using a single apparatus without requiring an operation of changing a fluid ejection nozzle even if each of the objects to be cleaned requires a different cleaning specification suitable therefor. SOLUTION: The cleaning apparatus comprised of a cleaning fluid ejection member 412 equipped with a high pressure cleaning nozzle 417a and a two-fluid cleaning nozzle 418a having mutually different ejection characteristics is made in such a manner that objects to be cleaned can be efficiently cleaned by selecting one of the above two nozzles e.g., the high pressure cleaning nozzle 417a and the two-fluid cleaning nozzle 418a depending on the kind of the objects to be cleaned using a single apparatus without requiring a nozzle changing operation even if each of the cleaning objects to be cleaned requires a different cleaning specification suitable therefor (e.g., a high pressure cleaning specification or a two-fluid cleaning specification). COPYRIGHT: (C)2008,JPO&INPIT
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