| 摘要 |
A radio frequency test key structure comprises a substrate, a bottom metal layer and a top metal layer. A narrow testing region is defined on the substrate. The bottom metal layer is positioned on the substrate and in the narrow testing region, and including an opening to expose parts of a device under test. The top metal layer is a metal pad in a sheet form, positioned in the narrow testing region and on the bottom metal layer. At least two signal pad regions and at least two ground pad regions are defined in the top metal layer. The signal pad regions and the ground pad regions are arranged in one row, and the row is parallel to the narrow testing region. Accordingly, the radio frequency test key structure can be positioned in a scribe line, and get an accurate testing result.
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