| 摘要 |
FIELD: technical physics. ^ SUBSTANCE: generator contains body, UHF-generator, discharge pipes made of glass or quartz with constant magnets, and electrodes positioned along the pipes; axes of the pipes are perpendicular, and planes of electrodes are parallel to power lines of magnets; to the end of first pipe in form of Wood's horn first branch is connected which is also in form of Wood's horn, the second branch is connected by ends to the middle of the first branch and to the end of the second pipe, end of which is used as output nozzle, and to the opposite end of second pipe a window is attached which emits ultraviolet radiation; the end of first pipe is connected to block of leaks, and pipe magnets are set up with possible movement along the pipes within limits of length of electrodes and with fixation of position. Generator is provided with a sensor for indicating presence of radicals, ions and electrodes during exit from the nozzle in form of florescent substance Zn2SiO4:Mn, UHF generator is made with possible reduction of power and positioning of plasma luminescence within limits of length of electrodes, and magnet of second pipe is made with possible placement near the window and detection of predominance of ultraviolet radiation. ^ EFFECT: increased efficiency and possible fast readjustment to required plasma component. ^ 3 cl, 4 dwg |
