| 摘要 |
PROBLEM TO BE SOLVED: To provide a paste coating device which can suppress a deterioration in position detecting accuracy, and further, can suppress a deterioration in reliability, a deterioration in cleanliness, and an increase in costs. SOLUTION: The paste coating device is provided with a coating head applying a paste to an object to be coated, a moving mechanism 4, 6A, 6B having a supporting part 10 supporting the coating head and moving the supporting part 10, a scale 16 having a plurality of scales S to detect the position of the supporting part 10 and provided on the supporting part 10 along a moving direction of the supporting part 10, and a plurality of detecting parts K1-Kn respectively provided lining up in the moving direction of the supporting part 10 at the interval of the length on which a plurality of scales S line or less, and detecting respectively a plurality of scales S. COPYRIGHT: (C)2008,JPO&INPIT
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