| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple, practical edge sensor suitable for detecting an edge position of an object to be detected easily and with high precision. SOLUTION: A light receiving device is arranged facing a light emitting device for emitting monochromatic collimated light with a predetermined light beam width. The light receiving device detects the diffraction pattern of the monochromatic collimated light caused by an edge of the object to be detected positioned in the optical path of the monochromatic collimated light. The light receiving device is provided with first and second linear image sensors of which their detection line directions are orthogonal to each other on a surface perpendicular to the optical axis of the monochromatic collimated light. COPYRIGHT: (C)2008,JPO&INPIT
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