| 摘要 |
PROBLEM TO BE SOLVED: To actualize normal growth of an oxide film on an aluminum foil for electrolytic capacitor when annealed, without being influenced by the air. SOLUTION: An aluminum foil coil 30 manufactured with cold rolling is stored in a main heating chamber 10 of an annealing furnace 1 having a sealed multiple chamber structure with an innermost chamber formed as the main heating chamber 10, and chambers 10, 20 are sealed. Negative pressure and positive pressure are given to the main heating chamber 10 and to a sub heating chamber 20 outside the main heating chamber, respectively, for heating annealing. Thus, annealing is performed in a negative pressure atmosphere without causing the entry of the air into the main heating chamber 10 and a cubic rate is increased while producing the homogeneous oxide film on the aluminum foil. The electrolytic capacitor aluminum foil superior in etching quality is effectively obtained. COPYRIGHT: (C)2008,JPO&INPIT
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