CARRIER FOR REDUCING ENTRANCE AND/OR EXIT MARKS LEFT BY A SUBSTRATE-PROCESSING MENISCUS
摘要
<p>A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.</p>
申请公布号
WO2008042295(A1)
申请公布日期
2008.04.10
申请号
WO2007US21003
申请日期
2007.09.27
申请人
LAM RESEARCH CORPORATION;O'DONNELL, ROBERT;LENZ, ERIC;WILCOXSON, MARK;RAVKIN, MIKE;YATSKAR, ALEXANDER, A.
发明人
O'DONNELL, ROBERT;LENZ, ERIC;WILCOXSON, MARK;RAVKIN, MIKE;YATSKAR, ALEXANDER, A.