METHODS AND SYSTEMS FOR ULTRA-PRECISE MEASUREMENT AND CONTROL OF OBJECT MOTION IN SIX DEGREES OF FREEDOM BY PROJECTION AND MEASUREMENT OF INTERFERENCE FRINGES,申请号EP20060787781-传众专利搜索

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发明名称	METHODS AND SYSTEMS FOR ULTRA-PRECISE MEASUREMENT AND CONTROL OF OBJECT MOTION IN SIX DEGREES OF FREEDOM BY PROJECTION AND MEASUREMENT OF INTERFERENCE FRINGES
摘要
申请公布号	EP1907788(A2)	申请公布日期	2008.04.09
申请号	EP20060787781	申请日期	2006.07.18
申请人	THE OHIO STATE UNIVERSITY	发明人	KIM, JUNG H.;MENQ, CHIA-HSIANG
分类号	G01B9/02;G03F7/20;G03F9/00	主分类号	G01B9/02
代理机构		代理人
主权项
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