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发明名称
摘要
申请公布号
JP4073890(B2)
申请公布日期
2008.04.09
申请号
JP20040127020
申请日期
2004.04.22
申请人
发明人
分类号
H01L21/822;H04R17/00;G02F1/1362;G09F9/00;H01L21/02;H01L21/336;H01L27/04;H01L27/06;H01L27/08;H01L27/12;H01L29/786;H02H9/00;H04R3/00;H04R23/00
主分类号
H01L21/822
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代理人
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地址
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