Micro surface shape measuring probe

摘要

There is disclosed a micro surface shape measurement probe including a probe shaft (4) having at a distant end thereof a probe member (2) for contacting an object (1) to be measured. A probe body (21) is provided with support means for movably supporting the probe shaft (4) in a non-contact manner. A pressing device presses and moves the probe shaft (4) towards the object (1) to be measured. A contact sensing device senses the contact pressure between the probe member (2) and the object (1) by irradiating a contact point between the probe member (2) and the object (1) with laser light through the probe member and detecting the laser light reflected by the contact point. A control device (9) adjusts the pressing force applied by the pressing device. A displacement amount measuring device measures the position of the probe member (2) in contact with the object (1) to be measured by the pressing force adjusted through the control device (9).