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发明名称
METHOD TO DEPOSIT AN IMPERMEABLE FILM ONTO A POROUS LOW-K DIELECTRIC FILM
摘要
申请公布号
EP1599614(A4)
申请公布日期
2008.04.09
申请号
EP20040708170
申请日期
2004.02.04
申请人
TEGAL CORPORATION
发明人
ZHANG, ZHIHONG;NGUYEN, TAI, DUNG;NGUYEN, TUE
分类号
H01L21/285;C23C16/40;H01L21/316;H01L21/318;H01L21/768
主分类号
H01L21/285
代理机构
代理人
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