发明名称 |
Test structure for measuring electrical and dimensional characteristics |
摘要 |
A test structure includes first and second combs, at least a first pair of base nodes, and a second pair of finger nodes. The first comb includes a first base and a first plurality of fingers extending from the first base. The second comb includes a second base and a second plurality of fingers extending from the second base. At least a portion of the first and second pluralities of fingers are interleaved. The first pair of base nodes extend from the first base. The second pair of finger nodes extend from a first finger of the first plurality of fingers.
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申请公布号 |
US7355201(B2) |
申请公布日期 |
2008.04.08 |
申请号 |
US20060426723 |
申请日期 |
2006.06.27 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
ZHU JIANHONG;WU DAVID D.;MICHAEL MARK W. |
分类号 |
H01L23/58 |
主分类号 |
H01L23/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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