发明名称 Pressure sensor and method for fabricating the same
摘要 A pressure sensor comprising a plurality of sensor parts arranged in matrix. A first electrode being connected with first wiring and a second electrode being connected with second wiring are disposed oppositely through a cavity part in the sensor part. The second electrode bends to the first electrode side in response to a pressure from a specimen and touches the first electrode upon application of a pressure of a specified level or above. When the specimen is pressed against a pressure detecting region, both electrodes touch each other at a sensor part corresponding to a protrusion of the specimen and are separated at a sensor part corresponding to a recess. When a scanning signal is fed from a scanning circuit to one wiring and presence of a signal flowing through the second wiring is detected by a sensing circuit, a pressure being applied to each sensor part can be detected. Furthermore, the shape is detected by feeding the scanning signal from the scanning circuit to each first wiring sequentially and scanning the pressure detecting region generally.
申请公布号 US7353719(B2) 申请公布日期 2008.04.08
申请号 US20050507687 申请日期 2005.07.08
申请人 SEIKO EPSON CORPORATION 发明人 HIURA SAYAKA;YAMAUCHI TAKAO;TAKETA KAORU;YOSHIDA KOJI;ENDO MASAKI
分类号 G01L1/00;B81B3/00;G01L1/14;G01L1/20;G01L5/22;G01L9/00;G06K9/00 主分类号 G01L1/00
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