APPARATUS FOR CLEANING GLASS SUBSTRATE

摘要

A substrate cleaning apparatus is provided to prevent the suspension of working due to the damage of a power transmission system during cleaning work, thereby reducing the defect ratio of the substrate. A base(1) has a transfer member for transferring a substrate. A power transmission member for transmitting power is offered to the base. Plural disc brushes(7,9) are offered to the base so that the substrate is cleaned by the power transmitted by the power transmission member. The power transmission member includes the power driving source offered to a side of the base. A driving shaft is driven by the power of the power transmission member. A gear member receives the rotation force of the driving shaft and controls the rotation direction of each disc brush. Plural rotation shafts are connected with a side of the gear member and transmit the rotation force to each disc brush. The gear member includes a vertical gear member connected and rotated with a driving shaft. A horizontal gear member is connected with the horizontal gear member horizontally and receive the rotation force of the vertical gear member.