发明名称 Method for making semiconductor device having a high-k gate dielectric layer and a metal gate electrode
摘要 A method for making a semiconductor device is described. That method comprises forming a first dielectric layer on a substrate, then forming a trench within the first dielectric layer. After forming a second dielectric layer on the substrate, a first metal layer is formed within the trench on a first part of the second dielectric layer. A second metal layer is then formed on the first metal layer and on a second part of the second dielectric layer.
申请公布号 US7355281(B2) 申请公布日期 2008.04.08
申请号 US20060393151 申请日期 2006.03.29
申请人 发明人
分类号 H01L29/40;H01L21/8234;H01L21/8238 主分类号 H01L29/40
代理机构 代理人
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