发明名称 |
POLISHING PAD |
摘要 |
<p>Disclosed is a polishing pad which is free from center-slow problems while having a good polishing rate and excellent life characteristics. Specifically disclosed is a polishing pad having a polishing layer which is made of a polyurethane resin foam having fine air bubbles. A high molecular weight polyol component as a raw material component for the polyurethane resin foam contains a hydrophobic high molecular weight polyol A having a number-average molecular weight of 550-800 and another hydrophobic high molecular weight polyol B having a number-average molecular weight of 950-1,300 at a weight ratio A/B of 10/90-50/50.</p> |
申请公布号 |
KR20080031486(A) |
申请公布日期 |
2008.04.08 |
申请号 |
KR20087004863 |
申请日期 |
2006.08.22 |
申请人 |
TOYO TIRE & RUBBER CO., LTD. |
发明人 |
OGAWA KAZUYUKI;SHIMOMURA TETSUO;NAKAI YOSHIYUKI;NAKAMORI MASAHIKO;YAMADA TAKATOSHI |
分类号 |
B24B37/20;B24B37/24;C08G18/65;H01L21/304 |
主分类号 |
B24B37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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