发明名称 |
Semiconductor apparatus testing arrangement and semiconductor apparatus testing method |
摘要 |
A semiconductor apparatus testing arrangement for testing a plurality of semiconductor devices produced on a semiconductor substrate, has a substrate on which a plurality of testing units are arranged, each unit comprising a probe needles corresponding to electrode terminals of the semiconductor device and electric conductor parts connected with the probe needles.
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申请公布号 |
US7355421(B2) |
申请公布日期 |
2008.04.08 |
申请号 |
US20060339826 |
申请日期 |
2006.01.26 |
申请人 |
FUJITSU LIMITED |
发明人 |
MARUYAMA SHIGEYUKI;ARISAKA YOSHIKAZU;TASHIRO KAZUHIRO;KATAYAMA TAKAYUKI;OZAWA TETSU;KIMURA YUUSHIN |
分类号 |
G01R31/02;G01R31/26;G06K5/04 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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