COMPLEX OXIDE FILM AND METHOD FOR PRODUCING SAME, DIELECTRIC MATERIAL INCLUDING COMPLEX OXIDE FILM, PIEZOELECTRIC MATERIAL, CAPACITOR, PIEZOELECTRIC ELEMENT, AND ELECTRONIC DEVICE

摘要

Disclosed is a complex oxide film having a high relative dielectric constant wherein carbonates are reduced by forming the complex oxide film on the surface of a base by wet processing and cleaning the thus-formed complex oxide film with an acidic solution having a pH of not more than 5. Also disclosed is a method for producing such a complex oxide film. Also disclosed are a dielectric material and piezoelectric material including such a complex oxide film, a capacitor element and a piezoelectric element containing such a material, and an electronic device comprising such an element.