| 摘要 |
A mechanism and method for supplying process gas, a gas processing apparatus, and a computer readable storage medium are provided to supply the process gas in a short time by temporarily storing the process gas in a process gas tanks and then supplying it to a process container. Process gas supply sources(30,31,32) supply process gas into a process container. Process gas tanks(33,34) temporarily store the process gas supplied from the process gas supply sources. A process gas communicating member(35) feeds the process gas from the process gas supply sources to the process gas tanks and feeds the process gas from the process gas tanks to the process container. The process gas is temporarily stored in the process gas tanks, and then is fed to the process container from the process gas tanks.
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