| 摘要 |
A magnetic bearing device includes an electromagnet for supporting a member without contact; an excitation amplifier for supplying an excitation current to the electromagnet; a carrier wave generation device for generating a carrier wave; and a sensor device for modulating the carrier wave to output a sensor signal according to a position of the member. An A/D conversion device converts the sensor signal to a digital value, and a demodulation calculation device demodulates through a digital calculation process according to the sensor signal converted to the digital value. A control device controls the excitation amplifier according to a calculation result of the demodulation calculation device.
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