| 摘要 |
<p>An apparatus and a method for processing a substrate, and an apparatus and a method for supplying energy consumed therein are provided to improve yield of a substrate processing by branching a cooling liquid supplied from a cooling liquid supplying implement. A substrate processing apparatus is provided with a plurality of heat treatment blocks. The substrate processing unit transfers a substrate to be processed to a heat treatment unit. A cooling liquid supply implement supplies a cooling liquid being set to a certain temperature. The cooling liquid is supplied to each of the heat treatment blocks. A supply implement branches the liquid supplied from the cooling liquid supply implement to supply the branched liquid to plural heat treatment temperature control instruments in each heat treatment block. Exhaust holes(W1,W2,W3,W4) form gas flow from a temperature control implement to the heat treatment unit.</p> |
