OPTICAL ELEMENT AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an optical element which has properties such as high hardness, humidity resistance, heat resistance and chemical stability and is provided with a protective film which can be transmitted by light of a wide wavelength region from an ultraviolet ray region to infrared ray region.

SOLUTION: The optical element is provided with an optical element base plate 1 and a hafnium oxide HfO2film 2 which is formed on the surface of the optical element base plate 1 by an ion beam assist deposition method and functions as the protective film for the optical element base plate 1.

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