| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate lineup device where each notch of two or more substrates can be aligned correctly, by devising the shape and position of an engagement axis. <P>SOLUTION: Since the center of an engagement axis 29 has a structure with a small diameter, which can be entered into a notch, the notch does not override an engagement axis 29. In a pair of support axes 25, 27, flange portions 37 are arranged alternately with each other. The mutual flange portion 37 are located on both sides of the engagement axis 29, while each flange portion 37 is arranged at a position, where movement of the engagement axis 29 in a horizontal direction, is restricted at the perimeter face thereof. In this way, even if a substrate W is rotated by a drive shaft 29 and the rotation movement is continued under condition, in which the notch is engaged with the engagement axis 29, dislocation of the engagement axis 29 is regulated by the flange portion 37, so warpage of engagement axis 29 to the longitudinal direction can be prevented. As a result, each notch of two or more substrates W can be aligned correctly in the same position. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
