| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for coating a base material capable of coating a base material weak to heat with a metal film made of at least one metal, a metal film made of two or more kinds of metals (including a metal film in which two or more kinds of metals are alloyed and a metal film in which two or more kinds of metals are made hybrid) and a metal film in which a metal oxide is incorporated therein at a low cost without applying a load on the environment. SOLUTION: The method for coating a base material comprises: a sticking stage S1 where, using a dispersed liquid in which the particulates of a metal oxide in which a metal element(s) composing the film is oxidized are dispersed into a liquid, the particulates are stuck to the surface of the base material; and a plasma treatment stage S2 where the base material stuck with the particulates is subjected to plasma treatment. In the plasma treatment stage S2, a reaction gas including a reducing gas is introduced into a plasma region generated by discharge, and the particulates are reduced, so as to be a metal film composed of the above metal element(s), and the surface of the base material is coated with the metal film. COPYRIGHT: (C)2008,JPO&INPIT
|
