| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus, a method and a program for producing CNT where the glowing velocity of CNT in any growth height can be observed on the spot and where the glowing condition of CNT is easily changed to be optimum. SOLUTION: The apparatus for producing CNT comprises a CNT glowing means where a carbon source is supplied into a chamber in which a substrate is placed and CNT is grown on the substrate and an observing means to measure the glowing height of CNT on the spot and where an optical microscope to catch an image on the side of the substrate and a digital camera to memorize the image as digital data are equipped. The method for producing CNT using the CNT producing apparatus and the program for producing CNT are provided. COPYRIGHT: (C)2008,JPO&INPIT
|
