摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device capable of reducing the height of its transfer face as much as possible while having a configuration using articulated arms. SOLUTION: In the transfer device 30, base end side arms 2 of a pair of free arms 4 comprising two arms (the base end side arm 2 and tip side arm 3) are rotatably mounted on base tables 1, and transfer arms 5 to which the tip side arms 3 are rotatably connected are provided. The structure between the transfer arms 5 and the tip side arms 3 allows vertical interference but prevents horizontal interference. COPYRIGHT: (C)2008,JPO&INPIT
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