摘要 |
A p-n junction is formed at the interface of a low-concentration n-type impurity layer 3 and a p-type diffusion region 5 in the vicinity of the upper major surface of an n-type semiconductor substrate 2 of a semiconductor device 1 . A mask 15 composed of an absorber is placed on the upper major surface of the semiconductor device 1 , and electron beams are radiated. Thereafter, heat treatment is conducted. As a result, the peak of the crystal lattice defect densities is present in the vicinity of the upper major surface of the n-type semiconductor substrate 2 , and the crystal lattice defect densities are decreasingly distributed toward the lower major surface. Thereby, a semiconductor device that can minimize the variation of the breakdown voltage characteristics of the p-n junction of the diode, and can control the optimum carrier lifetime can be obtained.
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