摘要 |
<P>PROBLEM TO BE SOLVED: To improve light incidence efficiency by reducing optical loss on an interface. <P>SOLUTION: The optical functional thin film element 1 is provided with a substrate 2, an electrode 3 formed on the surface of the substrate 2, an optical functional thin film 4 formed on the surface of the electrode 3, and an electrode 5 formed on the surface of the optical functional thin film 4. On the interface of the air and the substrate 2, the interface of the substrate 2 and the electrode 3 and the interface of the electrode 3 and the optical functional thin film 4, refractive index matching processing layers 6a, 6b and 6c reducing the refractive index differences on the interfaces are formed respectively by refractive index matching processing. <P>COPYRIGHT: (C)2008,JPO&INPIT |