| 发明名称 |
RETICLE, RETICLE CASE, METHOD FOR HOLDING RETICLE, AND EXPOSURE DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reticle, a reticle case, a method for holding a reticle and an exposure device, wherein a reticle is effectively prevented from being in contact with the reticle case or the contact force is reduced. <P>SOLUTION: The present invention is characterized in that a permanent magnet is disposed in the reticle and the reticle case. Furthermore, a permanent magnet to be disposed in the reticle is disposed to be repulsive against a permanent magnet to be disposed in the reticle case. <P>COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2008076679(A) |
申请公布日期 |
2008.04.03 |
| 申请号 |
JP20060254942 |
申请日期 |
2006.09.20 |
| 申请人 |
NIKON CORP |
发明人 |
OKUBO YUKIHARU;ISHIMA SUKIHIRO |
| 分类号 |
G03F1/24;G03F1/60;G03F1/66;H01L21/027 |
主分类号 |
G03F1/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
