发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 A method for fabricating a semiconductor device includes forming a plurality of memory cells and transistors over a substrate, forming a first stopping layer having tensile stress over the plurality of memory cells and transistors, forming a first insulation layer over the substrate and the first stopping layer, and forming a second stopping layer having compression stress over the first insulation layer.
申请公布号 US2008081462(A1) 申请公布日期 2008.04.03
申请号 US20070770879 申请日期 2007.06.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHOI SE-KYOUNG
分类号 H01L21/4763;H01L21/469 主分类号 H01L21/4763
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