发明名称 Semiconductor device having asymmetric bulb-type recess gate and method for manufacturing the same
摘要 A semiconductor device includes a silicon substrate; a device isolation structure formed in the silicon substrate to delimit an active region which has a pair of gate forming areas, a drain forming area between the gate forming areas, and source forming areas outside the gate forming areas; an asymmetric bulb-type recess gate formed in each gate forming area of the active region and having the shape of a bulb on the lower end portion of the sidewall thereof facing the source forming area; and source and drain areas respectively formed on the surface of the substrate on both sides of the asymmetric bulb-type recess gate.
申请公布号 US2008079068(A1) 申请公布日期 2008.04.03
申请号 US20060647875 申请日期 2006.12.29
申请人 KIM KYUNG DO 发明人 KIM KYUNG DO
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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