| 摘要 |
<P>PROBLEM TO BE SOLVED: To finely adjust quantity of light of exposure light by increasing an operation speed of a shutter. <P>SOLUTION: A shutter that blocks exposure light has a plurality of rotor plates 35a, 35b and allows the exposure light passing through a gap produced by rotation of the rotor plates to expose a substrate. Since the rotor plate 35a, 35b, unlike a shutter plate of a conventional rotary shutter mechanism, has a rotation axis R in a direction crossing the propagation direction of the exposure light and has a width W in a direction perpendicular to the rotation axis R, smaller than the optical path diameter of the exposure light, rotation of the shutter can be rapidly started and stopped. The operation speed of the shutter is therefore increased to reduce an open time of the shutter, and the quantity of light of the exposure light is finely adjusted. <P>COPYRIGHT: (C)2008,JPO&INPIT |
