IMPRINT MOLD, ITS MANUFACTURING METHOD, AND PATTERN FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a mold allowing the mold to be easily stripped from a resin, its manufacturing method, and a pattern formation method by an imprint method. SOLUTION: There is provided an imprint mold that is characterized by including a projection-recess pattern region on a face with the projection-recess pattern formed and a through hole outside the projection-recess pattern region on the face with the projection-recess pattern formed in the imprint mold for forming the projection-recess pattern. The imprint mold especially in such a form is characterized by including a plurality of the through holes, and is provided as a more preferable form. COPYRIGHT: (C)2008,JPO&INPIT