| 摘要 |
PROBLEM TO BE SOLVED: To provide a conditioning treatment method and device of an electron gun in which a voltage resisting property of an electron gun is improved in a simple way by removing efficiently and effectively an electric discharging factor existing on the surface of an electrode or an insulator composing the electron gun. SOLUTION: The electron gun conditioning treatment device 10 is provided with a voltage supply part 11, a voltage adjusting part 12 to adjust an output voltage of the voltage supply part 11 and a current detecting part 13 to detect a leakage current flowing between electrodes of the electron gun. And, there are provided a vacuum exhausting part 15 to adjust the inside of the electron gun in a reduced pressure condition and a voltage detecting part 16. And, a personal computer, for instance, makes a data processing base on a comparison between a leakage current detected by the current detecting part 13 and a standard value and controls a voltage impressed between electrodes through a connection part 14 from the voltage supply part 11 by the voltage adjusting part 12. COPYRIGHT: (C)2008,JPO&INPIT
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