| 摘要 |
PROBLEM TO BE SOLVED: To set a reference value to be high, when shutting down a semiconductor testing device by a current flowing instantly in a power supply line, while avoiding damage of a connector. SOLUTION: The semiconductor testing device has a constitution equipped with: a detection circuit for detecting the magnitude of a current flowing in the power supply line for supplying a power to a semiconductor device which is a device to be tested; the first shutdown signal output circuit for outputting the first shutdown signal, when the magnitude of the current detected by the detection circuit is larger than the first shutdown reference value; the second shutdown signal output circuit for calculating the mean value of each magnitude of the current detected by the detection circuit, and outputting the second shutdown signal, when the mean value is larger than the second shutdown signal reference value; and a shutdown processing execution part for executing shutdown processing, when the first shutdown signal or the second shutdown signal is outputted. COPYRIGHT: (C)2008,JPO&INPIT
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