| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device and its inspection method of high detection accuracy on flaw or foreign matter. SOLUTION: In this inspection device inspecting one surface of a translucent substrate as an inspecting surface, only the nearest zone to a lighting means among a plurality of zones is imaged from a side facing an inspecting surface, by holding a surface of the substrate on the opposite side of the inspection surface and lighting the inspection surface from above a plane including the inspection surface or from the outside of the normal of the inspection surface than the plane including the inspecting surface. COPYRIGHT: (C)2008,JPO&INPIT
|
