| 摘要 |
PROBLEM TO BE SOLVED: To provide an aerosol-spouting nozzle which is made from a small number of components and can be produced in a short period of time, even when the inner shape needs fine dimension accuracy and a complicated shape, and to provide a coating-film-forming apparatus using the nozzle. SOLUTION: The aerosol-spouting nozzle 2 is directed at forming a coating film on a substrate by spouting an aerosol containing fine particles dispersed in a gas to the surface of the substrate and colliding the fine particles against the surface of the substrate. The aerosol-spouting nozzle 2 is formed by stereolithography with the use of a photo-curing resin; and has an introduction opening 2da for introducing the aerosol therein and a spouting opening 2db for spouting the aerosol. The introduction opening 2da has a cross section of a circular shape. The spouting opening 2db has a cross section of a rectangular shape with an aspect ratio of 5 or more. COPYRIGHT: (C)2008,JPO&INPIT
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