发明名称 Method for building metal silicide in component field of semiconductor component, involves producing reaction temperature by irradiating component field by radiation of specified wavelength range
摘要 <p>The method involves producing a reaction temperature by irradiating a component field (110) by radiation of a specified wavelength range and building other metal silicide in other component field (120) of a semiconductor component (100) on the basis of other reaction temperature. The other reaction temperature is produced by irradiating the other component field by radiation of a specified wavelength range. The reaction temperature is smaller than other reaction temperature. Independent claims are also included for the following: (1) a method for selective modifying of surface properties of two component fields of a semiconductor component (2) a method for preparing two component fields of a semiconductor component.</p>
申请公布号 DE102006046376(A1) 申请公布日期 2008.04.03
申请号 DE20061046376 申请日期 2006.09.29
申请人 ADVANCED MICRO DEVICES INC. 发明人 PRESS, PATRICK;ROMERO, KARLA;TRENTZSCH, MARTIN;WIECZOREK, KARSTEN;FEUDEL, THOMAS;LENSKI, MARKUS;STEPHAN, ROLF
分类号 H01L21/336 主分类号 H01L21/336
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