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发明名称
SUBSTRATE TREATMENT APPRATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100819639(B1)
申请公布日期
2008.04.03
申请号
KR20057017612
申请日期
2005.09.20
申请人
发明人
分类号
C23C16/455;H01L21/205;C23C16/40;C23C16/44;C23C16/46;H01L21/00;H01L21/31;H01L21/314;H01L21/316
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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